The Busch Semiconductor Vacuum Group was founded with the aim of better serving the vacuum needs of semiconductor and flat panel display market.

Busch Semiconductor Vacuum Group supply a range of products noted for their functionality, compactness, ease of use and minimal environmental impact. Continuous investment in R&D is fundamental to the group's remarkable success to date. This focus has resulted in the development of "next generation" products, including the DS160, DS2002 and DL Series of COBRA Twin Screw Dry pumps, together with our advanced pump monitoring system, universal tool interface and 300 mm compliant products.